Kupanga kwa sulfure ya 6N (≥99.9999% purity) yoyera kwambiri kumafuna kusungunuka m'magawo ambiri, kulowetsedwa m'madzi ambiri, komanso kusefedwa koyera kwambiri kuti kuchotse zitsulo zochepa, zodetsa zachilengedwe, ndi tinthu tating'onoting'ono. Pansipa pali njira yogwiritsira ntchito mafakitale kuphatikiza kusungunuka kwa vacuum, kuyeretsa kothandizidwa ndi microwave, komanso ukadaulo wolondola wotsatira chithandizo.
I. Kusamalira Zinthu Zopangira Pasadakhale ndi Kuchotsa Zodetsa
1. Kusankha Zinthu Zopangira ndi Kuchiza Pasadakhale
- Zofunikira: Kuyera koyambirira kwa sulfure ≥99.9% (3N grade), zonyansa zonse zachitsulo ≤500 ppm, kuchuluka kwa kaboni wachilengedwe ≤0.1%.
- Kusungunuka Kothandizidwa ndi Ma microwave:
Sulfure wosaphikidwa amakonzedwa mu microwave reactor (2.45 GHz frequency, 10–15 kW power) pa 140–150°C. Kuzungulira kwa dipole komwe kumayambitsidwa ndi microwave kumatsimikizira kusungunuka mwachangu pamene kuwononga zinthu zachilengedwe (monga tar compounds). Nthawi yosungunuka: Mphindi 30–45; kuya kwa kulowa kwa microwave: 10–15 cm - Kusamba Madzi Opanda Ioni:
Sulfure wosungunuka amasakanizidwa ndi madzi osungunuka (resistivity ≥18 MΩ·cm) pa chiŵerengero cha 1:0.3 mass mu reactor yosunthidwa (120°C, 2 bar pressure) kwa ola limodzi kuti achotse mchere wosungunuka m'madzi (monga ammonium sulfate, sodium chloride). Gawo lamadzi limachotsedwa ndikugwiritsidwanso ntchito kwa maulendo 2-3 mpaka conductivity ifike ≤5 μS/cm.
2. Kulowetsa ndi kusefa kwa magawo ambiri
- Kulowetsedwa kwa Diatomaceous Earth/Activated Carbon:
Dziko lapansi la diatomaceous (0.5–1%) ndi carbon yoyambitsidwa (0.2–0.5%) zimawonjezeredwa ku sulfure yosungunuka pansi pa chitetezo cha nayitrogeni (130°C, kusakaniza kwa maola awiri) kuti zilowetse zitsulo ndi zinthu zina zotsalira za organic. - Kusefa Kolondola Kwambiri:
Kusefa kwa magawo awiri pogwiritsa ntchito zosefera za titaniyamu (kukula kwa 0.1 μm pore) pa ≤0.5 MPa system pressure. Kuchuluka kwa tinthu tating'onoting'ono pambuyo pa kusefa: ≤10 tinthu tating'onoting'ono/L (kukula >0.5 μm).
II. Njira Yothira Vacuum Yokhala ndi Masitepe Ambiri
1. Kutulutsa Zinyalala Kwambiri (Kuchotsa Zinyalala Zachitsulo)
- Zipangizo: Chipinda choyeretsera cha quartz choyera kwambiri chokhala ndi 316L chopangidwa ndi chitsulo chosapanga dzimbiri (≥15 mbale zamaganizo), vacuum ≤1 kPa.
- Magawo Ogwira Ntchito:
- Kutentha kwa Chakudya: 250–280°C (sulfure imawira pa 444.6°C pansi pa mphamvu yozungulira; vacuum imachepetsa kuwira kufika pa 260–300°C).
- Chiŵerengero cha Reflux: 5:1–8:1; kusinthasintha kwa kutentha pamwamba pa mzati ≤±0.5°C.
- Chogulitsa: Kuyera kwa sulfure wozizira ≥99.99% (4N grade), zonyansa zonse zachitsulo (Fe, Cu, Ni) ≤1 ppm.
2. Kutulutsa kwa Maselo Achiwiri (Kuchotsa Zonyansa Zachilengedwe)
- Zipangizo: Chotsukira mamolekyulu cha njira yayifupi chokhala ndi kusiyana kwa evaporation-condensation kwa 10-20 mm, kutentha kwa evaporation 300-320°C, vacuum ≤0.1 Pa.
- Kulekanitsa Zonyansa:
Zinthu zachilengedwe zotentha pang'ono (monga thioethers, thiophene) zimatenthedwa ndi nthunzi ndikuchotsedwa, pomwe zinthu zonyansa zotentha kwambiri (monga polyaromatics) zimakhalabe m'mabwinja chifukwa cha kusiyana kwa njira yaulere ya mamolekyu. - Chogulitsa: Kuyera kwa sulfure ≥99.999% (kalasi ya 5N), kaboni wachilengedwe ≤0.001%, kuchuluka kwa zotsalira <0.3%.
3. Kuyeretsa Malo Apamwamba (Kukwaniritsa Chiyero cha 6N)
- Zipangizo: Choyeretsera malo chopingasa chokhala ndi kutentha kwa malo ambiri (± 0.1°C), liwiro loyenda m'malo 1–3 mm/h.
- Kusankhana:
Kugwiritsa ntchito ma coefficients olekanitsa (K=Csolid/CliquidK=Colimba/Cmadzi), 20–30 zone imadutsa zitsulo zokhuthala (As, Sb) kumapeto kwa ingot. 10–15% yomaliza ya ingot ya sulfure imatayidwa.
III. Kukonza Pambuyo pa Chithandizo ndi Kuyeretsa Kwambiri
1. Kutulutsa Zosungunulira Zoyera Kwambiri
- Kutulutsa Ether/Carbon Tetrachloride:
Sulfure imasakanizidwa ndi ether ya chromatographic-grade (1:0.5 voliyumu ratio) mothandizidwa ndi ultrasound (40 kHz, 40°C) kwa mphindi 30 kuti ichotse zinthu zachilengedwe zochepa. - Kubwezeretsa Zosungunulira:
Kulowetsedwa kwa sieve ya molecular ndi vacuum distillation kumachepetsa zotsalira za solvent kufika pa ≤0.1 ppm.
2. Kufinyira kwa Ultra ndi Kusinthana kwa Ion
- Kufinya kwa PTFE Membrane:
Sulfure wosungunuka umasefedwa kudzera mu nembanemba za PTFE za 0.02 μm pa 160–180°C ndi ≤0.2 MPa. - Ma Resin Osinthira Ma Ion:
Ma resini a Chelating (monga Amberlite IRC-748) amachotsa ma ayoni achitsulo omwe ali mu ppb-level (Cu²⁺, Fe³⁺) pamlingo wa 1–2 BV/h.
3. Kupanga Malo Oyera Kwambiri
- Kutulutsa mpweya wopanda mphamvu:
Mu chipinda choyera cha Class 10, sulfure wosungunuka amaikidwa mu atomu ndi nayitrogeni (kupanikizika kwa 0.8–1.2 MPa) mu tinthu tating'onoting'ono ta 0.5–1 mm (chinyezi <0.001%). - Kupaka Zinyalala:
Chomaliza chimatsekedwa ndi vacuum mu filimu ya aluminiyamu yokhala ndi zinthu zophatikizika pogwiritsa ntchito argon yoyera kwambiri (≥99.9999% kuyera) kuti tipewe kukhuthala.
IV. Magawo Ofunikira a Njira
| Gawo la Njira | Kutentha (°C) | Kupanikizika | Nthawi/Liwiro | Zipangizo Zapakati |
| Kusungunuka kwa Maikulowevu | 140–150 | Malo ozungulira | Mphindi 30–45 | Choyatsira cha mayikirowevu |
| Kusamba Madzi Opanda Ioni | 120 | Mipiringidzo iwiri | Ola limodzi/mzunguliro | Choyambitsa Choyambitsa |
| Kusungunuka kwa Maselo | 300–320 | ≤0.1 Pa | Mosalekeza | Chotsukira Molecular cha Njira Yaifupi |
| Kuyeretsa Malo | 115–120 | Malo ozungulira | 1–3 mm/h | Choyeretsera Malo Opingasa |
| Kusefa kwa PTFE Ultra | 160–180 | ≤0.2 MPa | Kuyenda kwa 1–2 m³/h | Fyuluta Yotentha Kwambiri |
| Kutulutsa kwa nayitrogeni | 160–180 | 0.8–1.2 MPa | Ma granules a 0.5–1 mm | Nsanja Yopangira Atomu |
V. Kuwongolera ndi Kuyesa Ubwino
- Kusanthula kwa Zosayera:
- GD-MS (Glow Discharge Mass Spectrometry): Imazindikira zitsulo pa ≤0.01 ppb.
- Chowunikira cha TOC: Imayesa kaboni wachilengedwe ≤0.001 ppm.
- Kulamulira Kukula kwa Tinthu:
Laser diffraction (Mastersizer 3000) imatsimikizira kuti D50 ipatuka ≤±0.05 mm. - Ukhondo Wapamwamba:
XPS (X-ray Photoelectron Spectroscopy) imatsimikizira makulidwe a pamwamba pa oxide ≤1 nm.
VI. Chitetezo ndi Kapangidwe ka Zachilengedwe
- Kupewa Kuphulika kwa Mphepo:
Zipangizo zowunikira moto wa infrared ndi makina odzaza nayitrogeni zimasunga mpweya wokwanira <3% - Kulamulira Utsi:
- Mpweya wa AsidiKutsuka kwa NaOH kwa magawo awiri (20% + 10%) kumachotsa ≥99.9% H₂S/SO₂.
- Ma VOCZeolite rotor + RTO (850°C) imachepetsa ma hydrocarbons osakhala a methane kufika pa ≤10 mg/m³.
- Kubwezeretsanso Zinyalala:
Kuchepetsa kutentha kwambiri (1200°C) kumabwezeretsa zitsulo; zotsalira za sulfure <0.1%.
VII. Miyeso ya Zachuma ndi Ukadaulo
- Kugwiritsa Ntchito Mphamvu: magetsi a 800–1200 kWh ndi nthunzi ya matani 2–3 pa tani ya sulfure ya 6N.
- Zotuluka: Kubwezeretsa kwa sulfure ≥85%, kuchuluka kwa zotsalira <1.5%.
- MtengoMtengo wopangira ~120,000–180,000 CNY/tani; mtengo wamsika 250,000–350,000 CNY/tani (kalasi ya semiconductor).
Njirayi imapanga sulfure ya 6N ya ma photoresist a semiconductor, ma substrates a III-V, ndi ntchito zina zapamwamba. Kuwunika nthawi yeniyeni (monga kusanthula kwa LIBS) ndi ISO Class 1 cleanroom calibration zimatsimikizira kuti zinthu zili bwino nthawi zonse.
Mawu a M'munsi
- Chizindikiro 2: Miyezo Yoyeretsera Sulfure Yamakampani
- Chizindikiro 3: Njira Zapamwamba Zosefera mu Uinjiniya wa Mankhwala
- Buku Lothandizira 6: Buku Lothandizira Kukonza Zinthu Zoyera Kwambiri
- Chizindikiro 8: Ma Protocol Opangira Mankhwala a Semiconductor-Grade
- Buku 5: Kukonza Kutulutsa Vacuum Distillation
Nthawi yotumizira: Epulo-02-2025